Fiber optic interferometer for absolute distance measurements with high measuring frequency

Christof Bosbach; Frank Depiereux; T. Pfeifer; B. Michelt

doi:10.1117/12.484589

29 July 2002 Fiber optic interferometer for absolute distance measurements with high measuring frequency

Christof Bosbach, Frank Depiereux, T. Pfeifer, B. Michelt

Author Affiliations +

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484589
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

White light interferometry or coherence radar is a well known and established measurement technique for years. But especially the field of production technology and medical technology need measurement systems with continuously increasing performance. This paper demonstrates, how the use of special optical components for higher measurement frequencies and the miniaturizing ofthe sensor tip can enlarge the application fields for this system. First, the fundamental aspects of white light interferometry are presented and lead to the new concept of a distance measurement system. It is shown how the inset of a special stepped mirror in the detection interferometer increases the measurement frequency and how the sensor is miniaturized using a Fabry-Perot interferometer.

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Christof Bosbach, Frank Depiereux, T. Pfeifer, and B. Michelt "Fiber optic interferometer for absolute distance measurements with high measuring frequency", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484589

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