29 July 2002 High-energy capacitive step micromotors
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484485
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
The operation principle and peculiarities of step micromotors based on the effect of electrostatic rolling of thin metallic films on the ferroelectric surface are studied. The characteristics of the reversible step micromotor designed on the basis of the described effect, using barium strontium niobate Ba0.5Sr0.5Nb2O6 with 2-4 ?m thickness and dielectric permeability value equal to 2000 — 4000 are given. The voltage pulse duration is equal to ? - 50 — 500 ?s, clock frequency equal to 1 — 10 kHz. The moving element step can range from 100Å to 10 ?m, depending on V and ?.
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Edvard G. Kostsov, Edvard G. Kostsov, } "High-energy capacitive step micromotors", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484485; https://doi.org/10.1117/12.484485
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