29 July 2002 Interference methods for measuring of rough surfaces
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484454
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
We propose two techniques for measuring roughness, on the basis of measurement of a phase variance of the boundary object field and on a transverse coherence function of a field, as well as the devices implementing these techniques. The techniques are based on the random phase screen (RPS) approach [1, 2], which assumes: (i) all spatial frequency components associated with the phase structure of the object contribute to the formation of the radiation field resulting from interaction of the probing beam with the object; (ii) phase variance of the object's boundary field is small, ?2?0 < 1 ; (iii) the correlation length of the RPS's inhomogeneity is larger than the wavelength, i.e. /?0 > ? .Aunique relationship is known to exist within this approach between the statistical parameters describing the object structure and associated correlation parameters of the scattered field [2].
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Oleg V. Angelsky, Gennady V. Demyanovskii, Peter P. Maksimyak, "Interference methods for measuring of rough surfaces", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484454; https://doi.org/10.1117/12.484454
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