29 July 2002 Laser ellipsometry: precise method of surface measurement
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484455
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
Systematization of major fields of laser ellipsometry application is given and basic ways of its development are considered. A series of industrially oriented laser ellipsometers have been developed. These are a scanning high-spatial resolution microellipsometer and a high-time resolution in-situ ellipsometer. The partial accuracy chart of the laser ellipsometers and the issues of their metrological certification are described. The possibilities of laser ellipsometry are illustrated by experimental measurements performed on equipment designed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. V. Rykhlitski, S. V. Rykhlitski, E. V. Spesivtsev, E. V. Spesivtsev, V. A. Shvets, V. A. Shvets, } "Laser ellipsometry: precise method of surface measurement", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484455; https://doi.org/10.1117/12.484455
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