29 July 2002 Linear moving meters designed on the basis of laser probing of scales of the type surface acoustic wave (SAW) - diffraction grating (DG)
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484572
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
A comparative analysis of moving meters schemes of an acoustic-optical type is carried out. Reference scales formed by surface acoustic waves and diffraction gratings are used in these schemes. The system SAW-DG is probed by a laser beam. The measurement of movement is effected by change of the phase of a signal at SAW frequency in the optoelectronic channel. Repeatability, resolving power, exactitude, range of measurements are analyzed. The resolving power better than 0,05 microns can be reached using SAW wave-length in a range of 30 up to 100 microns.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. A. Komotskii, "Linear moving meters designed on the basis of laser probing of scales of the type surface acoustic wave (SAW) - diffraction grating (DG)", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484572; https://doi.org/10.1117/12.484572
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