29 July 2002 Linear moving meters designed on the basis of laser probing of scales of the type surface acoustic wave (SAW) - diffraction grating (DG)
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484572
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
A comparative analysis of moving meters schemes of an acoustic-optical type is carried out. Reference scales formed by surface acoustic waves and diffraction gratings are used in these schemes. The system SAW-DG is probed by a laser beam. The measurement of movement is effected by change of the phase of a signal at SAW frequency in the optoelectronic channel. Repeatability, resolving power, exactitude, range of measurements are analyzed. The resolving power better than 0,05 microns can be reached using SAW wave-length in a range of 30 up to 100 microns.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. A. Komotskii, V. A. Komotskii, } "Linear moving meters designed on the basis of laser probing of scales of the type surface acoustic wave (SAW) - diffraction grating (DG)", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484572; https://doi.org/10.1117/12.484572
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