29 July 2002 Nanometrology: problems and solutions
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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484566
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
This paper is devoted to consideration of current development of linear measurement metrology in nanometer range — nanometrology, where the problems of measurement instruments in this range are given. On the basis of analysis of possibilities of different methods and means of nanometrology, and also technology of creation and constructions of different measures of small dimensions, recommendations are given to provide the best resolution, stability and measurement error in nanometer range. Results of experimental investigation of etalon measurement system on the basis of scanning probe microscope and laser interferometer-photometer for 3D measurements of linear dimensions with atomic resolution in the real time scale are given. The concept of nanometer metrology is developed.
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V. V. Kalendin, V. V. Kalendin, } "Nanometrology: problems and solutions", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484566; https://doi.org/10.1117/12.484566
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