Nanopositioning and measuring technique

Gerd Jaeger; Eberhard Manske; Tino Hausotte; Hans-Joachim Buechner; Rainer Gruenwald

doi:10.1117/12.484563

29 July 2002 Nanopositioning and measuring technique

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Hans-Joachim Buechner, Rainer Gruenwald

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484563
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

At the Institute of Process Measurement and Sensor Technology of the TU Ilmenau, a scanning force microscope (measuring range 15 ?m x 75 tm x 15 ?m) having a laser-interferometric 3D-nanomeasuring system free from Abbe errors has been developed in cooperation with the PTB Braunschweig. The extended measuring uncertainty (K =2) is only 0.2 nm and was obtained with a structure standard. To achieve a considerable extension of the measuring range up to 25 mmx 25 mm x 5 mm, a nanopositioning and —measuring machine was developed. The resolution of the measuring axes is 1.24 nm. The laser-interferometric measurement is free from Abbe errors of 1St order in all measuring axes. The deviations of the guides used are compensated by means of a precision mirror corner.

Citation Download Citation

Gerd Jaeger, Eberhard Manske, Tino Hausotte, Hans-Joachim Buechner, and Rainer Gruenwald "Nanopositioning and measuring technique", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484563

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