New challenges and approaches to interferometric MEMS and MOEMS testing

Malgorzata Kujawinska; Christophe Gorecki

doi:10.1117/12.484467

29 July 2002 New challenges and approaches to interferometric MEMS and MOEMS testing

Malgorzata Kujawinska, Christophe Gorecki

Author Affiliations +

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484467
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The paper gives the overview of various concepts of optical measurements of microelements including MEMS, MOEMS and electronic packages. In particular it describes waveguide microinterferometer which enables an alternative usage of conventional interferometry (CI), grating interferometry (GI) and digital holographic interferometry for shape in-plane and out-of-plane displacement measurements of static and dynamic microobjects. Additionally interferometric thermography (IT) is presented for determination of 3D refractive index distribution in fibre optics and waveguide microelements. To prove the applicability of these experimental tools, the wide selection of measurement examples is given.

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Malgorzata Kujawinska and Christophe Gorecki "New challenges and approaches to interferometric MEMS and MOEMS testing", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484467

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