29 July 2002 Scanning probe microscopy for nanotechnology
Author Affiliations +
Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484562
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
The review on the contact and noncontact scanning probe techniques for nanoscale operations and control are given in this article. The problems of development of these tools are discussed. The examples of surface images for different materials up to the atomic resolution are presented.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor A. Bykov, "Scanning probe microscopy for nanotechnology", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484562; https://doi.org/10.1117/12.484562
PROCEEDINGS
15 PAGES


SHARE
Back to Top