Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution

Ondrej Cip; Frantisek Petru

doi:10.1117/12.484568

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29 July 2002 Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution

Ondrej Cip, Frantisek Petru

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Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484568
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

We present three methods of scale-linearity verification for high-resolution laser interferometers. Methods are scoped to Michelson type interferometer where detection technique with signals in quadrature supported by a single-frequency He—Ne laser is used. Theory, experimental implementation, and measured results of each method are summarized. A short overview of principle of quadrature detection system and digital correction of the scale non-linearity is included also. The contribution highlights main difficulties arisen from each presented method.

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Ondrej Cip and Frantisek Petru "Set of experimental methods for scale-linearity verification in laser interferometers with nanometer resolution", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484568

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