Surface and nanometrology: Markov and fractal scale of size properties

David J. Whitehouse

doi:10.1117/12.484633

29 July 2002 Surface and nanometrology: Markov and fractal scale of size properties

David J. Whitehouse

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484633
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The paper explores the effect that a reduction in the scale of size has on performance, manufacture and metrology. It is shown that there are profound changes in which sometimes the meanings of operations and parameters diverge.

Citation Download Citation

David J. Whitehouse "Surface and nanometrology: Markov and fractal scale of size properties", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484633

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