29 July 2002 Surface and nanometrology: Markov and fractal scale of size properties
Author Affiliations +
Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484633
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation
Abstract
The paper explores the effect that a reduction in the scale of size has on performance, manufacture and metrology. It is shown that there are profound changes in which sometimes the meanings of operations and parameters diverge.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David J. Whitehouse, David J. Whitehouse, } "Surface and nanometrology: Markov and fractal scale of size properties", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); doi: 10.1117/12.484633; https://doi.org/10.1117/12.484633
PROCEEDINGS
17 PAGES


SHARE
RELATED CONTENT

Enabling technologies for nanostructuring
Proceedings of SPIE (June 15 2005)
The challenge of nanometrology
Proceedings of SPIE (July 23 2002)
Some topics in surface and nanometrology
Proceedings of SPIE (May 29 2003)

Back to Top