18 October 2002 Design and manufacturing of actuating beams with mirror and electrodes with mirror support pyramid on substrate for optical switch
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Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467717
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
Studies on opticla switches have been researched and develoepd for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at the mirror parts inside the manipulator. Therefore, in order to develop optical switches capable of switching to multi input and output, we suggested an electrostatic driving-type 2-DOF micro-manipulator that was composed of one mirror with four screw type beams, four screw type electrodes on a substrate and one mirror support pyramid situated under the mirror. One mirror with four screw tuype beams for support of the mirror and four screw electrodes on the substrate wiht a one mirror support pyramid were made sparately. In the final step of the manufacturing process, these two parts were combined. The four beams are able to move by the electrostatic forces between the screw beams and the four screw electrodes on the substrate. We call this four beam type actuator an electrostatic suction actuator. In the results, the micro mirror is capable of a large angular output displacement about plus or minus 30 degrees in theory. The mnaufactured mirro and beams and the manufactured screw electrodes and mirror support pyramid, respectively are manufactured. In this research, after having studied the shapes and dimensions of micro-manipulators capable of a large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacemtn through the use of the suction phenomena. Moreover, our study suggestd a manufactured mirror and beams, and the manufactured screw electrodes, and mirror support pyramid for the optical switch.
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Mikio Horie, Mikio Horie, Taketo Gozu, Taketo Gozu, Daiki Kamiya, Daiki Kamiya, "Design and manufacturing of actuating beams with mirror and electrodes with mirror support pyramid on substrate for optical switch", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467717; https://doi.org/10.1117/12.467717


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