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18 October 2002 Design of a calibration machine for optical two-dimensional length standards
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Proceedings Volume 4902, Optomechatronic Systems III; (2002)
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μm and 5μm, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bjorn Hemming, Ilkka Palosuo, and Antti Lassila "Design of a calibration machine for optical two-dimensional length standards", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002);

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