18 October 2002 In situ optical probe interferometer for measuring displacement of nanoindenter: a configuration
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Proceedings Volume 4902, Optomechatronic Systems III; (2002); doi: 10.1117/12.467681
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
Abstract
Instrumented indentation testing in the nano-range with 'nanoindentation instrument' is playing an increasing role in the characterization of the mechanical properties of thin layers used in surface technology, microelectronics, micromechanics, optics etc. Several works concerning calibration of nanoindentation instruments were published in the last years, and the calibration of the performance of the depth sensing system in a nanoindentation instrument is now under way. In this paper, an optical probe interferometer for calibrating the depth measuring system in a Hysitron Triboscope has been presented, the principle and configuration of the interferometer are detailed. Error sources in the interferometry and their contribution to the interferometer performance have been discussed, which proves that the newly developed calibration device possesses the capability of sensing displacement with subnanometric accuracy.
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Zhi Li, Konrad Herrmann, Frank Pohlenz, "In situ optical probe interferometer for measuring displacement of nanoindenter: a configuration", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467681; https://doi.org/10.1117/12.467681
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KEYWORDS
Interferometers

Calibration

Digital Light Processing

Interferometry

Microelectronics

Opto mechatronics

Picosecond phenomena

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