18 October 2002 Parallel robot for micro assembly with integrated innovative optical 3D-sensor
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Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467484
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
Recent advances in the fields of MEMS and MOEMS often require precise assembly of very small parts with an accuracy of a few microns. In order to meet this demand, a new approach using a robot based on parallel mechanisms in combination with a novel 3D-vision system has been chosen. The planar parallel robot structure with 2 DOF provides a high resolution in the XY-plane. It carries two additional serial axes for linear and rotational movement in/about z direction. In order to achieve high precision as well as good dynamic capabilities, the drive concept for the parallel (main) axes incorporates air bearings in combination with a linear electric servo motors. High accuracy position feedback is provided by optical encoders with a resolution of 0.1 μm. To allow for visualization and visual control of assembly processes, a camera module fits into the hollow tool head. It consists of a miniature CCD camera and a light source. In addition a modular gripper support is integrated into the tool head. To increase the accuracy a control loop based on an optoelectronic sensor will be implemented. As a result of an in-depth analysis of different approaches a photogrammetric system using one single camera and special beam-splitting optics was chosen. A pattern of elliptical marks is applied to the surfaces of workpiece and gripper. Using a model-based recognition algorithm the image processing software identifies the gripper and the workpiece and determines their relative position. A deviation vector is calculated and fed into the robot control to guide the gripper.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juergen Hesselbach, Juergen Hesselbach, Diana Ispas, Diana Ispas, Gero Pokar, Gero Pokar, Sven Soetebier, Sven Soetebier, Rainer Tutsch, Rainer Tutsch, "Parallel robot for micro assembly with integrated innovative optical 3D-sensor", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467484; https://doi.org/10.1117/12.467484


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