18 October 2002 Reflection moire for high spatial resolution
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Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467398
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
Abstract
A new technique is proposed to keep a high spatial resolution when using both a reflection moire and using an integrating-bucket phase shifting method. In moire method an image includes high spatial frequency components of the gratings and the second harmonics of them besides moire fringe. These high frequency components cause measurement error when using phase shifting technique. By combining these two methods for a reflection moire we realized to eliminate both the high frequency components of gratings and the second harmonics of them with keeping high-speed measurement. We proved that theory of the new technique and good experimental results.
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Hisatoshi Fujiwara, Hisatoshi Fujiwara, Yukitoshi Otani, Yukitoshi Otani, Toru Yoshizawa, Toru Yoshizawa, } "Reflection moire for high spatial resolution", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467398; https://doi.org/10.1117/12.467398
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