18 October 2002 Surface profiling method for large aspheres: diffraction image-forming approach
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Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467512
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
Investigation of surface profiling method for large aspheres becomes more and more important and imperative with the great development of the synchrotron radiaiton facility (SRF), since the latter puts greater demands on surface quality, shape and figure parameters of the optical elements used in itself. MEanwhile, things became more difficult because of the unique characteristics of the optics used in SRF. As a result, novel surface measurement methods and systems have to be developed to cope with such problems.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Zhi Li, Yang Zhao, Dacheng Li, "Surface profiling method for large aspheres: diffraction image-forming approach", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); doi: 10.1117/12.467512; https://doi.org/10.1117/12.467512


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