Vertical-scanning profilometry using double-exposure camera and two short-coherent light sources of different wavelengths

Masaaki Adachi; Katsuyuki Inabe

doi:10.1117/12.467345

18 October 2002 Vertical scanning profilometry using double-exposure camera and two short-coherent-light sources of different wavelengths

Masaaki Adachi, Katsuyuki Inabe

Author Affiliations +

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467345
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

We propose a new vertical-scanning profilometry which has potentiality of realizing high-speed measurement. The proposed profilometry measures 3-D shape by use of phase-shifting techniques with a large phase shift 2n π + π/2. With such large shifts, 2 pai phase ambiguities normally suffer precision measurements of phases. Therefore, the profilometry was equipped with two short-coherent-light sources of different wavelengths and a double-exposure camera, and measures the phases of two different wavelengths at nearly the same optical path difference. From the phases and a vertical-scanning step height, 3-D profile is calculated with nanometer precision.

Citation Download Citation

Masaaki Adachi and Katsuyuki Inabe "Vertical scanning profilometry using double-exposure camera and two short-coherent-light sources of different wavelengths", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467345

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