28 August 2002 Thermo-optic dispersion properties of aluminum nitride with an optical waveguide technique
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Proceedings Volume 4904, Optical Fiber and Planar Waveguide Technology II; (2002) https://doi.org/10.1117/12.481263
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China
Abstract
An aluminum nitride thin film on sapphire substrate was prepared by metal-organic chemical-vapor deposition for optical waveguide study. In order to investigate thermo-optic dispersion properties of aluminum nitride waveguide, a new experimental arrangement is designed. The thermo-optic properties of thin film are obtained using a prism coupled waveguide devices, which has auto-temperature controlling system. The temperature range is 30 ° C — 85° C with the control accuracy of ± 1 ° C. The experiment was carried out by using different light source with wavelength of 441.6 nm, 514.5 nm, and 632.8nm. A set of curve of thermo-optic dispersion of aluminum nitride film is given.
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Yifang Yuan, Qiyang Zhu, Baoxue Chen, Changsong Fu, Ping Li, "Thermo-optic dispersion properties of aluminum nitride with an optical waveguide technique", Proc. SPIE 4904, Optical Fiber and Planar Waveguide Technology II, (28 August 2002); doi: 10.1117/12.481263; https://doi.org/10.1117/12.481263
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