23 August 2002 System approach to MEMS commercialization
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Proceedings Volume 4906, Optical Components and Transmission Systems; (2002) https://doi.org/10.1117/12.480619
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China
Abstract
The system approach considers a priori the interdependence of all technologies integrated into a MEMS product. Parallel development of these technologies and enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir Vaganov, Vladimir Vaganov, } "System approach to MEMS commercialization", Proc. SPIE 4906, Optical Components and Transmission Systems, (23 August 2002); doi: 10.1117/12.480619; https://doi.org/10.1117/12.480619
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