23 August 2002 System approach to MEMS commercialization
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Proceedings Volume 4906, Optical Components and Transmission Systems; (2002) https://doi.org/10.1117/12.480619
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China
Abstract
The system approach considers a priori the interdependence of all technologies integrated into a MEMS product. Parallel development of these technologies and enabling wafer-level batch manufacturing through process integration is key to successful product development and meaningful cost reduction.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir Vaganov, Vladimir Vaganov, "System approach to MEMS commercialization", Proc. SPIE 4906, Optical Components and Transmission Systems, (23 August 2002); doi: 10.1117/12.480619; https://doi.org/10.1117/12.480619
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