DWDM multiple-channel power equalizer using MEMS technology

Xu Ming Zhang; Ai Qun Liu; Yue Chuan Lu; F. Wang; C. Lu

doi:10.1117/12.482273

3 September 2002 DWDM multiple-channel power equalizer using MEMS technology

Xu Ming Zhang, Ai Qun Liu, Yue Chuan Lu, F. Wang, C. Lu

Proceedings Volume 4907, Optical Switching and Optical Interconnection II; (2002) https://doi.org/10.1117/12.482273
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China

Abstract

This paper reports the design, modeling, fabrication and testing of a novel variable optical attenuator for multi-channel power equalizers to be used in dense wavelength division multiplexed (DWDM) systems. The attenuator is fabricated by silicon surface micromachining technology and is then manually assembled and integrated with two single mode optical fibers that act as optical input and output. A 40 × 40 ?m2 mirror coated with gold is driven by a proprietary drawbridge structure to cut partially into the light path between two fibers, enabling the attenuation. The attenuator has a dimension of 0.6 × 1 mm2 excluding the fibers. It has 1.5 dB insertion loss and 45 dB attenuation range, and requires only 8 V driving voltage, showing that it is promising for DWDM applications. Optical and mechanical models of the attenuator have also been established. Although the models are developed with the initial intention of modeling the MEMS attenuator, they are also available to the other types of devices in which the preconditions of the models are satisfied.

Citation Download Citation

Xu Ming Zhang, Ai Qun Liu, Yue Chuan Lu, F. Wang, and C. Lu "DWDM multiple-channel power equalizer using MEMS technology", Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); https://doi.org/10.1117/12.482273

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available