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12 September 2002 Fabrication of NiTi shape-memory alloy microdevices using laser
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Abstract
NiTi shape memory alloy thin film has been proved to be the best micro actuation mechanism due to the largest displacement and the highest actuation force as compared with other mechanisms. The combination of laser and traditional MEMS techniques might provide a better and cheaper solution for the fabrication of micro devices. In this paper, we present some preliminary results of cutting and annealing of NiTi shape memory alloy thin films using different types of lasers.
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WeiMin Huang, Q. He, M. H. Hong, Q. Xie, Yongqing Fu, and Hejun Du "Fabrication of NiTi shape-memory alloy microdevices using laser", Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); https://doi.org/10.1117/12.482892
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