12 September 2002 Microprocessing by UV laser
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Abstract
In this paper, the principles of laser-materials interaction by UV laser have been reviewed. In addition, several successful applications by using pulsed UV laser including surface treatment, surface ablation as well as formation of nanometer particles have been presented.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qihong Lou, Qihong Lou, Tiejun Li, Tiejun Li, } "Microprocessing by UV laser", Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); doi: 10.1117/12.482869; https://doi.org/10.1117/12.482869
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