20 September 2002 Numerical simulation of nonlinear electric field for diamond film gowth via EACVD
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Abstract
Monte Carlo simulations are adopted to develop a numerical program to study the electron motion in the H2/CH4 gas mixture and the non-uniform electric field during diamond synthesis via Electric Assisted Chemical Vapor Deposition (EACVD) in order to understand this dynamical process. It is proved in this paper that there exists a reverse electric field near the substrate. With this reverse electric field, the effective radicals such as CH3+ and CH+ can be speeded up and impact on the substrate with a higher speed, thus increase the probability of bonding. At last the electron average energy distribution and the steady space distributions of the effective radicals such as CH3, CH3+, CH+ and H under this field distribution are given in this paper.
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Qingxun Zhao, Qingxun Zhao, Hongli Xin, Hongli Xin, Qinruo Wen, Qinruo Wen, Jingfa Yang, Jingfa Yang, Jing Zhang, Jing Zhang, Zheng Yan, Zheng Yan, } "Numerical simulation of nonlinear electric field for diamond film gowth via EACVD", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.465650; https://doi.org/10.1117/12.465650
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