Quantitative phase measurement interference microscope for transparent objects

Jun Chen; Junji Endo; Hiroyuki Fujita

doi:10.1117/12.465754

20 September 2002 Quantitative phase measurement interference microscope for transparent objects

Jun Chen, Junji Endo, Hiroyuki Fujita

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.465754
Event: Photonics Asia, 2002, Shanghai, China

Abstract

We present a new interference microscope for quantitative measurement of transparent objects. High precision measurement is achieved by applying the phase-shifting interferometry to an ordinary transmission optical microscope. In that microscope, a bi-prism inserted between a magnifying lens and an observation plane is used as both a beam splitter and a phase shifter. The phase shift required for phase extraction using the phase-shifting technique is introduced by laterally shifting the bi-prism with a piezoelectric transducer. The diffraction caused by the vertex of the bi-prism is avoided by placing a thin wire at the center position of an intermediate image plane. Experimental results for measuring the refractive index distribution of an optical waveguide and the thickness of a biological sample are presented to demonstrate the usefulness of the this method.

Citation Download Citation

Jun Chen, Junji Endo, and Hiroyuki Fujita "Quantitative phase measurement interference microscope for transparent objects", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.465754

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