20 September 2002 Research on the 1D PSD
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Position Sensitive Detector (PSD) is a device utilizing the lateral photoelectric that produced by the non-uniform illumination of a rectifying semiconductor junction. The linear requirement, spectral responds, position detection error of 1D PSD were presented in this paper. All these studied works are the theoretical basis for designing and fabrication PSD with excellent performance. The experimental results show that the rms non-linearity and the typcial position error are 0.1% of full length (8 mm) and ±5μm.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiangqun Cao, Xiangqun Cao, Bin Lin, Bin Lin, Meizhen Huang, Meizhen Huang, Xuming Wu, Xuming Wu, Yuqing Chen, Yuqing Chen, } "Research on the 1D PSD", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); doi: 10.1117/12.471904; https://doi.org/10.1117/12.471904


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