Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step profile

Osami Sasaki; Kunihiro Honma; Takamasa Suzuki

doi:10.1117/12.465819

20 September 2002 Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile

Osami Sasaki, Kunihiro Honma, Takamasa Suzuki

Author Affiliations +

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.465819
Event: Photonics Asia, 2002, Shanghai, China

Abstract

An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.

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Osami Sasaki, Kunihiro Honma, and Takamasa Suzuki "Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.465819

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