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9 September 2002 PSD-based angle-detecting principle for ESG
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This paper presents the angle detecting principle based on Position Sensitive Detector (PSD). Two approaches are compared, which are plane-reflection and image-reflection. The calculations executed show the former scheme requires lens with longer focal distance, and that the sensor will have bigger size. Because of miniaturization of sensors for ESG theoretical work is mainly done on the latter approach in this paper. After analyzing the angle detecting principle, the mathematical model is derived and steps to calculate displacement of ESG 's momentum are presented. Since the model is a non-linear and implicit function, it is simplified to be easy to realize in engineering application. Based on the simplified model, it is shown that the direct component in the output of PSD is proportional to the polar axis displacement of ESG in a certain range. The result verifies possibility to use PSD as the angle detecting sensor of ESG.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weifeng Tian, Junpu Wang, and Zhihua Jin "PSD-based angle-detecting principle for ESG", Proc. SPIE 4920, Advanced Sensor Systems and Applications, (9 September 2002);


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