5 September 2002 Development of lithography technologies
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Abstract
Optical manufacturing is very important to semiconductor, photonics and MEMS, and lithography is a core part of optical manufacturing. The development of lithography technologies, such as coating, exposure, resist and thick resist lithography, are mainly introduced.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiang Jun, Jiang Jun, "Development of lithography technologies", Proc. SPIE 4921, Optical Manufacturing Technologies, (5 September 2002); doi: 10.1117/12.481731; https://doi.org/10.1117/12.481731
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