Micro-optical elements made of silver-halide sensitized gelatin etched by enzyme with real-time mask

Yongkang Guo; Qinjun Peng; Jianhua Zhu; Yangsu Zeng; Shijie Liu; Chunlei Du

doi:10.1117/12.481499

30 August 2002 Micro-optical elements made of silver-halide sensitized gelatin etched by enzyme with real-time mask

Yongkang Guo, Qinjun Peng, Jianhua Zhu, Yangsu Zeng, Shijie Liu, Chunlei Du

Proceedings Volume 4924, Holography, Diffractive Optics, and Applications; (2002) https://doi.org/10.1117/12.481499
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper a new method has been developed for fabricating micro-optical element by exposing silver-halide sensitized gelatin (SHSG) through real-time mask and etching SHSG with enzyme solution. The principle of etching SHSG with enzyme solution is given in detail and the optimum technique parameters of this process are presented, furthermore the theoretical analysis and solving scheme for the nonlinearities which come from the absorption of light energy by film are given. It is experimentally obtained a good linear relationship in a range of 4µm deep. At last, the micro-cylindrical lens and micro axicon array are achieved by experiment, and the results are evaluated for experiments by stylus profiling instrument and interference microscope.

Citation Download Citation

Yongkang Guo, Qinjun Peng, Jianhua Zhu, Yangsu Zeng, Shijie Liu, and Chunlei Du "Micro-optical elements made of silver-halide sensitized gelatin etched by enzyme with real-time mask", Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); https://doi.org/10.1117/12.481499

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