Translator Disclaimer
30 August 2002 Micro-optical elements made of silver-halide sensitized gelatin etched by enzyme with real-time mask
Author Affiliations +
Abstract
In this paper a new method has been developed for fabricating micro-optical element by exposing silver-halide sensitized gelatin (SHSG) through real-time mask and etching SHSG with enzyme solution. The principle of etching SHSG with enzyme solution is given in detail and the optimum technique parameters of this process are presented, furthermore the theoretical analysis and solving scheme for the nonlinearities which come from the absorption of light energy by film are given. It is experimentally obtained a good linear relationship in a range of 4µm deep. At last, the micro-cylindrical lens and micro axicon array are achieved by experiment, and the results are evaluated for experiments by stylus profiling instrument and interference microscope.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yongkang Guo, Qinjun Peng, Jianhua Zhu, Yangsu Zeng, Shijie Liu, and Chunlei Du "Micro-optical elements made of silver-halide sensitized gelatin etched by enzyme with real-time mask", Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); https://doi.org/10.1117/12.481499
PROCEEDINGS
7 PAGES


SHARE
Advertisement
Advertisement
Back to Top