Surface relief micro-optical elements built in hybrid sol-gel glass

XiaoCong Yuan; W. X. Yu; Shaohua Tao; Wai Chye Cheong; V. Koudriachov; Nam Quoc Ngo

doi:10.1117/12.481509

30 August 2002 Surface relief micro-optical elements built in hybrid sol-gel glass

XiaoCong Yuan, W. X. Yu, Shaohua Tao, Wai Chye Cheong, V. Koudriachov, Nam Quoc Ngo

Proceedings Volume 4924, Holography, Diffractive Optics, and Applications; (2002) https://doi.org/10.1117/12.481509
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In micro-optical elements design, in order to achieve an optimal performance and reduce the undesired background optical system noise, multilevel phase-only micro-optical elements and/or continuous-relief structures are required. The multilevel and continuous relief structures can be fabricated by multiple exposures through a set of binary masks, electron-beam direct writing, laser-beam direct writing and grey scale masks. For mass production of cost-effective monolithic micro-optical elements, the high-energy beam-sensitive (HEBS) glass offers an opportunity to generate a grey-scale mask for analogue 3D surface relief structures. In this paper, a negative-tone inorganic-organic hybrid SiO2/TiO2 glass is investigated for the fabrication of refractive and diffractive micro-optical elements. The sol-gel material enjoys an advantage over the conventional photoresist based fabrication techniques due to its single step etching-free process.

Citation Download Citation

XiaoCong Yuan, W. X. Yu, Shaohua Tao, Wai Chye Cheong, V. Koudriachov, and Nam Quoc Ngo "Surface relief micro-optical elements built in hybrid sol-gel glass", Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); https://doi.org/10.1117/12.481509

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KEYWORDS

Sol-gels

Glasses

Absorbance

Photomasks

Ultraviolet radiation

Diffractive optical elements

Microlens

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