30 August 2002 Three-dimensional phase profilometry based on object phase shifting method with fringe stabilizing system
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Abstract
In order to decrease the phase shift error, this paper presented a new object phase shifting method by using fringe stabilizing device to stabilize the interference fringe. The experimental result shows the fringe drift is less than ?/20 in five minutes , and the phase shifting precision is more than 0.004 ? , furthermore the system is very simple, performance reliable and operating convenience, it will take an important role for improving the measure precision of 3-D phase profilometry, more strong practicality and popularly application prospect.
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Liyun Zhong, Liyun Zhong, Yimo Zhang, Yimo Zhang, Xiaoxu Lu, Xiaoxu Lu, Shuzhen Ma, Shuzhen Ma, Bingheng Xiong, Bingheng Xiong, "Three-dimensional phase profilometry based on object phase shifting method with fringe stabilizing system", Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); doi: 10.1117/12.481493; https://doi.org/10.1117/12.481493
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