5 September 2002 Rapid laser scanner based on electro-optical array waveguide
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Abstract
A novel rapid laser electro-optical scanning system is studied. Theoretical and experimental analysis shows the feasible ofthe system. Based on the theory of optical phased array, the operating characteristic of the electro-optical waveguide array scanner, the core part of the rapid laser electro-optical scanning system, are specifically investigated. According to the theoretically result of the design parameters of the electro-optical waveguide array scanner, a 4 waveguides array is fabricated by use of AlGaAs crystal through MOCVD. By using of a designed device, steering of laser beam is realized. Experimental results of the A1GaAs-based optical scanner conformed the performance of the scanning system, such as rapid scanning (0~10MHz) and wide scan zone (30 Deg).
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiali Li, Jiali Li, Shunxiang Shi, Shunxiang Shi, } "Rapid laser scanner based on electro-optical array waveguide", Proc. SPIE 4926, Adaptive Optics and Applications II, (5 September 2002); doi: 10.1117/12.481693; https://doi.org/10.1117/12.481693
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