20 September 2002 Advances in Interferometric Metrology
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Abstract
Modern electronics, computers, and software have made interferometry an extremely powerful tool in many fields including the testing of optical components and optical systems. This paper will discuss some of the recent advances in reducing the sensitivity of phase-shifting interferometers to vibration.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James C. Wyant, James C. Wyant, } "Advances in Interferometric Metrology", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.472495; https://doi.org/10.1117/12.472495
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