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20 September 2002 Design and fabrication of infrared hybrid refractive/diffractive optical system for 3-5μm band
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Abstract
An infrared hybrid refractive/diffractive optical system for 3 to 5μm band, which is composed of four refractive elements and one binary optical element (BOE), has been designed and manufactured. The BOE, whose chromatic behavior is opposite to that of the refractive element, has made it possible for us to design the diffraction limited optical system with field of 40× 40, aperture of 60mm, F number of 2.46, total track of 140mm and temperature range from minus 30°C~70°C. A polar coordinate laser direct writing system (PLDWS) and a reactive ion beam etching (RIBE) device have been established to manufacture the BOE. The imaging performance of our optical system has been tested by Ealing IR MTF equipment, which shows that the diameter of spot is less than 80μm when the energy within the spot is 90% of the total.
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Jian Bai, Xiyun Hou, Yibing Shen, Yiyong Liang, and GuoGuang Yang "Design and fabrication of infrared hybrid refractive/diffractive optical system for 3-5μm band", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); https://doi.org/10.1117/12.471184
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