20 September 2002 Polar-coordinate laser writer: analysis of exposure dose distribution
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Abstract
In the single point laser direct writing (LDW) process, there are differences between the exposure dose distribution and the light intensity distribution, and the differences will bring the line profile errors. In this paper, the equations to calculate the exposure dose distribution for the polar coordinate laser direct writing system are presented. The differences between the exposure dose distribution and the light intensity distribution are discussed. The line profile in the photoresist after development is predicted. The experimental results agree well with the theoretical forecast.
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Yongjun Xie, Yongjun Xie, Zhenwu Lu, Zhenwu Lu, Fengyou Li, Fengyou Li, Zhicheng Weng, Zhicheng Weng, "Polar-coordinate laser writer: analysis of exposure dose distribution", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.464067; https://doi.org/10.1117/12.464067
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