20 September 2002 Scaling method using laser inteference for microdisplacement measurement system
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Proceedings Volume 4927, Optical Design and Testing; (2002); doi: 10.1117/12.471709
Event: Photonics Asia, 2002, Shanghai, China
The accuracy of the micro-displacement feed detection and control is decided by the calibration of the system. On the basis of laser interference principle, a new scaling method is introduced. Combining hardware subdivision and software subdivision, the scaling system can calibrate the micro-displacement effectively. The scaling system is composed of optical interferometer, signal processing circuits and microprocessor. Experiments proved that it is feasible to rectify the micro-displacement system with laser interference. The resolution of the micro-displacement is better than 0.1 micron after it was revised.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaojin Zhu, Xinmin Qi, Yiqing Gao, Lihua Yuan, "Scaling method using laser inteference for microdisplacement measurement system", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.471709; https://doi.org/10.1117/12.471709


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