20 September 2002 Scaling method using laser inteference for microdisplacement measurement system
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Abstract
The accuracy of the micro-displacement feed detection and control is decided by the calibration of the system. On the basis of laser interference principle, a new scaling method is introduced. Combining hardware subdivision and software subdivision, the scaling system can calibrate the micro-displacement effectively. The scaling system is composed of optical interferometer, signal processing circuits and microprocessor. Experiments proved that it is feasible to rectify the micro-displacement system with laser interference. The resolution of the micro-displacement is better than 0.1 micron after it was revised.
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Xiaojin Zhu, Xinmin Qi, Yiqing Gao, Lihua Yuan, "Scaling method using laser inteference for microdisplacement measurement system", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.471709; https://doi.org/10.1117/12.471709
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