20 September 2002 Vibration-resistance technology of phase-shifting interferometry
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Abstract
A vibration-resistance phase-shifting interferometer (PSI) was recently constructed and demonstrated. In this instrument, we have developed a method for actively compensating for vibration using a closed-loop phase servo system. An essential feature of this is phase modulating interference fringes fractionizing technology. This method can detect the fringe movement at 1/400 fringe interval, so fringes phase can be locked by the closed-loop feedback within 0.005 π. And the instrument implements phase shifting with the same piezoelectric transducer (PZT) that also compensates for vibration as feedback device. A microprogrammed control unit (MCU) is used to process phase information from photoelectric receiver, and then output the control signal to PZT driver. Experiments show that this solution is unique.
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Dong Wu, Dong Wu, Jinbang Chen, Jinbang Chen, Lei Chen, Lei Chen, Ziming Wu, Ziming Wu, Wulantuya Lee, Wulantuya Lee, } "Vibration-resistance technology of phase-shifting interferometry", Proc. SPIE 4927, Optical Design and Testing, (20 September 2002); doi: 10.1117/12.464059; https://doi.org/10.1117/12.464059
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