Capacitive rf MEMS switch with composite beam

Min Miao; Zhiyong Xiao; Guoying Wu; Yilong Hao; Haixia Zhang

doi:10.1117/12.483181

10 September 2002 Capacitive rf MEMS switch with composite beam

Min Miao, Zhiyong Xiao, Guoying Wu, Yilong Hao, Haixia Zhang

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483181
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper, RF MEMS capacitive switch with a novel metal/dielectric (Au/SiN) composite beam on highly resistive silicon substrate is presented. The low-stress SiN under the Au electrode layer is adopted due to its excellent dielectric and mechanical characteristic. Four beam structures are designed, and mechanical/electrostatic and high frequency analysis tools are used to explore their performance. It can be seen from the analysis that satisfying switching property can be obtained from careful choice and optimization of the structure. Besides, the switch has shown excellent radio frequency (RF) performance. In addition, the composite beam, which is stiffer than pure metal ones, may not only provide good DC insulation and RF isolation augmentation but also theoretically help to reduce the danger of beam stiction. With different structures, this switch can meet the requirement of a wide variety ofhigh frequency applications. These features made this micro switch an optimal solution for mobile or fixed RF applications, such as in the construction of millimeter wave phase shifter MMIC and switched tunable filters, for wireless telecommunication or radar use.

Citation Download Citation

Min Miao, Zhiyong Xiao, Guoying Wu, Yilong Hao, and Haixia Zhang "Capacitive rf MEMS switch with composite beam", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483181

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available