10 September 2002 Capacitive rf MEMS switch with composite beam
Author Affiliations +
Abstract
In this paper, RF MEMS capacitive switch with a novel metal/dielectric (Au/SiN) composite beam on highly resistive silicon substrate is presented. The low-stress SiN under the Au electrode layer is adopted due to its excellent dielectric and mechanical characteristic. Four beam structures are designed, and mechanical/electrostatic and high frequency analysis tools are used to explore their performance. It can be seen from the analysis that satisfying switching property can be obtained from careful choice and optimization of the structure. Besides, the switch has shown excellent radio frequency (RF) performance. In addition, the composite beam, which is stiffer than pure metal ones, may not only provide good DC insulation and RF isolation augmentation but also theoretically help to reduce the danger of beam stiction. With different structures, this switch can meet the requirement of a wide variety ofhigh frequency applications. These features made this micro switch an optimal solution for mobile or fixed RF applications, such as in the construction of millimeter wave phase shifter MMIC and switched tunable filters, for wireless telecommunication or radar use.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Min Miao, Min Miao, Zhiyong Xiao, Zhiyong Xiao, Guoying Wu, Guoying Wu, Yilong Hao, Yilong Hao, Haixia Zhang, Haixia Zhang, } "Capacitive rf MEMS switch with composite beam", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483181; https://doi.org/10.1117/12.483181
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Temperature stress impact on power RF MEMS switches
Proceedings of SPIE (May 14 2007)
Low loss SPDT metal to metal contacts RF MEMS switch...
Proceedings of SPIE (January 05 2006)
A study on high isolation RF MEMS switch
Proceedings of SPIE (February 06 2006)
Failure mechanisms of DC and capacitive RF MEMS switches
Proceedings of SPIE (January 05 2006)

Back to Top