Error analysis of micro strain gauge with a mechanical amplifier

Zutao Liu; Qing-An Huang; Yanfeng Jiang

doi:10.1117/12.483180

10 September 2002 Error analysis of micro strain gauge with a mechanical amplifier

Zutao Liu, Qing-An Huang, Yanfeng Jiang

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483180
Event: Photonics Asia, 2002, Shanghai, China

Abstract

The micro strain gauge with a mechanical amplifier can be in situ fabricated with active micro sensors or actuators for monitoring residual strain effects, and both tensile and compressive residual strains can be measured via the strain gauge. But the error of numerical models has not been quantitatively analyzed. The source of error is due mainly to the uncertain input values, which contain error of geometric structures and other properties. A detail error analysis to passive micro strain gauges with mechanical amplifiers, e.g. the micro-rotating-structure and other passive strain gauges, is given in this paper. And a comparison of the error of micro strain gauges is also presented so as to give a guideline for selecting the best type of microstructure.

Citation Download Citation

Zutao Liu, Qing-An Huang, and Yanfeng Jiang "Error analysis of micro strain gauge with a mechanical amplifier", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483180

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