10 September 2002 Excimer laser micromachining technology in biochip
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This paper briefly introduce our work on new biochip manufacuring utilizing excimer laser micromachining. The experiment results shows, that this technology have potentials in actual microstructure forming, processing way, manufacturing cost, efficiency, etc. We investigate the projection mask ablation on PMMA, and get the microgear sample. With the relative motion between the workpiece and the mask, the repeated excimer laser pulse will etch a 3D microstructures, or even form several different profiles on the straight line microgroove. This will be very useful for the microchannel formation on Biochip.
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Tao Chen, Tao Chen, Jiming Chen, Jiming Chen, Yu Zhang, Yu Zhang, Bohua Ying, Bohua Ying, Tao Jing, Tao Jing, Tiechuan Zuo, Tiechuan Zuo, } "Excimer laser micromachining technology in biochip", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483155; https://doi.org/10.1117/12.483155

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