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10 September 2002 Micro translation table for near-field data storage using inverted-scratch-drive actuators
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We proposed a micro-translation-table to convey a recording medium to a near-field optical head. The microtranslation- table consisted of inverted scratch-drive-actuators (SDAs) actuated by electrostatic force. The microtranslation- table was fabricated on a silicon substrate with surface micromachining technology. The SDAs were arrayed in the same direction. An object was translated by mounting the object on the inverted SDA array. Each SDA can be operated with the step resolution of 1 nanometer order. Therefore, the SDA array is precise as well as powerful. We observed that a micro object was translated in the designed direction with the fabricated SDAs by applying AC voltage of ±600 V at 100Hz. The size of the SDA plate was 70 µm long, 70 µm wide, 1.3µm thick and with the bushing of 1 .5 µm high. We proposed a novel mechanism releasing the SDAs from the object by retracting them. Therefore, the X-Y translation is possible by placing the inverted SDAs in four different directions. When the SDA was retracted, the vertical displacement of the SDA plate was measured.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoshiaki Kanamori, Hiroto Yahagi, Minoru Sasaki, Takahito Ono, and Kazuhiro Hane "Micro translation table for near-field data storage using inverted-scratch-drive actuators", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002);


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