10 September 2002 Optimization and simulation of the surface acoustic wave motor
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Abstract
Using the numerical analysis method, the mechanism of the surface acoustic wave (SAW) motor is further discussed, the performances of the SAW motor under different slider and stator contact conditions are examined, and many factors that affect the efficiency of the SAW motor are introduced. In addition, the design of SAW motor with power circulation structure is illustrated. Experiments show that the efficiency of the SAW motor increases, and the threshold driving voltage of the SAW motor reduces.
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Xiquan Cui, Xiquan Cui, Lan Wu, Lan Wu, Hai-jun Zhang, Hai-jun Zhang, } "Optimization and simulation of the surface acoustic wave motor", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483178; https://doi.org/10.1117/12.483178
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