10 September 2002 Pd/Ni bilayer electrochemical microactuator
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The hydrogen actuating microactuator works in the caustic electrolyte, the chemical stability of the materials is very important for the lifetime of this kind of microactuators,. As compared with mischmetal (Mm) based LaNi5 series alloy films reported before, palladium layers is more suitable for this purpose, In this paper, a prototype of electrochemical microactuator with Pd/Ni bilayer based on the hydrogen induced actuation is presented, the performance and microfabrication process of this microactuator are described in detail.
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Jinyuan Yao, Jinyuan Yao, Guifu Ding, Guifu Ding, Ying Cao, Ying Cao, Chunsheng Yang, Chunsheng Yang, Tianhui Shen, Tianhui Shen, } "Pd/Ni bilayer electrochemical microactuator", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); doi: 10.1117/12.483172; https://doi.org/10.1117/12.483172

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