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17 September 2002 Readout of super-resolution pits with Sb super-resolution reflective films
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Abstract
By using Sb as the super-resolution reflective layer and the SiN as dielectric layer, the super-resolution pits with a diameter of 380 nm were read out by the readout optics system with a laser wavelength of 632.8 nm and a NA of 0.40. In addition, the influence of the Sb thin film thickness on the readout signal was investigated, the results showed that the optimum Sb thin film thickness is 28 to approximatley 30 nm, and the maximum CNR is 38 to approximately 40 dB.
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Hao Ruan and Jingsong Wei "Readout of super-resolution pits with Sb super-resolution reflective films", Proc. SPIE 4930, Advanced Optical Storage Technology, (17 September 2002); https://doi.org/10.1117/12.483344
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